The four constituent of ion pump and titanium pump

Sputter ion pump mainly comprises an anode, a cathode, a permanent magnet and a pump body four parts.The anode is a honeycomb like structure composed of a plurality of stainless steel cylinder arranged, the cathode is the two parallel of titanium alloy plates , and the anode caught in the middle, three are keeping a certain distance between and connected by a high-voltage insulating ceramics.

  Applying 3~7 kV DC high voltage anode, cathode grounding. Yin and yang plate is sealed inside the titanium pumps body, pump body in external adsorption of oppositely placed two pieces of permanent magnet, magnetic field direction and the vertical plate, the magnetic induction intensity 1000~2000Gs.

Titanium pumps and Pan Ning discharge

The working process of sputtering titanium pumps is complex, simple can be summarized as follows,
First of all, starting power source, generate high voltage between the plates in the Yin and yang. Because of the inter stage was very close, according to E=U/d, the numerical E electric field intensity is very large, especially in the anode tube wall at the edge.

  In a strong electric field and parallel to the magnetic field, using the spiral mode of high speed motion of electrons, due to the increase in the electron motion stroke,titanium alloy pump , greatly improves the probability of collision with the gas molecular.

  Electron collisions with gas molecules in space to generate positive ions and two electrons, generated electrons continue to produce new positive ions,titanium coil  and electrons with the gas molecular collision.The discharge is called Pan Ning Pan Ning discharge, discharge can be carried out in the pressure is very low.

Titanium pumps and two kinds of sublimation pump

Ion pump and sublimation pump can obtain high vacuum degree,titanium coil , but using them to obtain higher vacuum will have great difficulty. This work has a great relationship with them.

  The ability to capture the gas molecular titanium pumps rely on physical adsorption of Co..chemical bond sublimation pump energy produced although large, but easily formed on the surface of saturated, affecting the further absorption gas, and sublimation pump on the adsorption effect of inert gas is not good.

  The two types of pump combined, can get better effect of sputtering ion pump suction.

Titanium pump and electric clearing ion pump

Method for trapping gas molecules can also use ionizing adsorption. Using a high-speed electron impact gas molecules can be obtained positive ion, positive ion in the electric field was banished to the negative electrode,titanium ingot price and after due to intermolecular Vander Vauls Ley was metal adsorption and no longer leave electrode.

  This reduces the space gas molecule concentration can be obtained, the purpose of vacuum. This phenomenon is called electric clearance, using the electric clearance to reach the purpose of degassing pump ( titanium pumps )called ion pump. Gas ion pump on the adsorption of no selective.

Principle of sputtering ion pump and titanium pump

As early as the beginning of this century, some people in the metal vacuum electron tube evaporation of some chemical activity and strong, so that it failed to and tube net pumping gas reaction, thereby reducing the gas molecule concentration space.( Titanium Casting Manufacturer )

  This metal and plays the same role is called a getter material, this method is called the chemical cleaning. Experiments show that, using titanium continuous evaporation to a cooling wall, can be formed with considerable pumping speed of the titanium pumps , the formation of simple sublimation pump.

The manufacturing principle and the basic working principle of titanium pump

Vacuum is the essence of molecules with low concentration of gas space. Therefore, as long as the gas molecule concentration can reduce the space vacuum, without actually exhaust process.

  titanium pump is based on the principle of manufacture.

  By heating, ionization methods make titanium atomic and space of gas molecules to a series of complex physical and chemical reaction, the gas molecule with titanium atoms deposited together, so as to achieve the purpose of reducing the space gas molecule concentration.

  This is the basic principle of titanium alloy pump. This and the principle of compression pump (to be gas from one party to another party to obtain the compression vacuum) different.

Titanium pump and vacuum pump

Titanium pump is a vacuum pump, but it is different from the ordinary compression type pump.

  titanium  pump has no rotary mechanism, also do not use the vacuum pump oil, it uses the way of removing gas trapping of gas molecules, can get high vacuum cleaner, which improve the quality of the light source has a great help.


  However, titanium pump special degassing principle and special structure to make it with the ordinary vacuum pump operation, maintenance and repair are different.

Sputtering ion pump fault

Titanium pump is a non polluting and ultra high vacuum pump, can be divided into titanium sublimation pump, titanium pump evaporator  several.

  Sputtering ion pump generates Pan Ning discharge in high voltage and high magnetic field, gas molecules adsorbed to the vacuum container.

  Due to aging equipment or improper operation and other reasons, sputtering ion pump will fault.

Titanium pump power

Titanium pump power is high resistance power supply, its no-load output voltage in the 3~7KV rooms, but a large load current, the output voltage drops to about 400V.

  General sputtering ion pump to use 5KV voltage rectifier. titanium alloy pump can flow through the anode and cathode of the discharge current reflected in space vacuum pumping.

  Sputtering ion pump Iion discharge current at rated voltage and the strength of the magnetic field (mA) and pressure P (Torr) have a certain curve.

  So the ion pump power can be reflected by the size of the pressure. Pump power display panel are,titanium pump output DC high voltage and discharge current.