The four constituent of ion pump and titanium pump

Sputter ion pump mainly comprises an anode, a cathode, a permanent magnet and a pump body four parts.The anode is a honeycomb like structure composed of a plurality of stainless steel cylinder arranged, the cathode is the two parallel of titanium alloy plates , and the anode caught in the middle, three are keeping a certain distance between and connected by a high-voltage insulating ceramics.

  Applying 3~7 kV DC high voltage anode, cathode grounding. Yin and yang plate is sealed inside the titanium pumps body, pump body in external adsorption of oppositely placed two pieces of permanent magnet, magnetic field direction and the vertical plate, the magnetic induction intensity 1000~2000Gs.