Titanium pump power is high resistance power supply, its no-load output voltage in the 3~7KV rooms, but a large load current, the output voltage drops to about 400V.
General sputtering ion pump to use 5KV voltage rectifier. titanium alloy pump can flow through the anode and cathode of the discharge current reflected in space vacuum pumping.
Sputtering ion pump Iion discharge current at rated voltage and the strength of the magnetic field (mA) and pressure P (Torr) have a certain curve.
So the ion pump power can be reflected by the size of the pressure. Pump power display panel are,titanium pump output DC high voltage and discharge current.
