Sputtering ion pump generates Pan Ning discharge in high voltage and high magnetic field, gas molecules adsorbed to the vacuum container.
Due to aging equipment or improper operation and other reasons, sputtering ion pump will fault.
Titanium Precision Casting
2015年3月5日星期四
Sputtering ion pump fault
Titanium pump is a non polluting and ultra high vacuum pump, can be divided into titanium sublimation pump, titanium pump evaporator several.
Sputtering ion pump generates Pan Ning discharge in high voltage and high magnetic field, gas molecules adsorbed to the vacuum container.
Due to aging equipment or improper operation and other reasons, sputtering ion pump will fault.
Sputtering ion pump generates Pan Ning discharge in high voltage and high magnetic field, gas molecules adsorbed to the vacuum container.
Due to aging equipment or improper operation and other reasons, sputtering ion pump will fault.
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