2015年4月1日星期三

The working process of ion pump and titanium pumps


Positive ion gas molecules are ionized after the formation of the acceleration to the cathode plate motion, because a lot of energy, have a strong impact of cathode sputtering,titanium pumps , large amounts of titanium atoms are bombarded, sedimentary suffer from ion bombardment weak area in the anode and cathode plate on the cylinder wall, forming the titanium film gas adsorption activity of fresh,titanium alloy pump , and inert gas buried in the cathode sputtering not strong regional.