There are two kinds of structure: Sunrui titanium pump diode pump and three pole pump. Diode, titanium pump, it generated by permanent magnet strength is 0.1 ~ 0.3 tesla's axial magnetic field, the anode is composed of a number of 0.1 ~ 0.3 mm thick, 12 ~ 40 mm diameter stainless steel thin wall cylinder, the anode at both ends for 1 ~ 3 mm thick titanium cathode, plus 3 ~ 7 kv voltage between the poles, produce strong electric fields. Electric field will electronic pull between two cathode to anode, in to the center line of the anode movement, faster and faster, with a cross the center line, from the other side of the cathode repulsion, began to slow motion, near the cathode, reverse speed to zero. Electronic repeat the exercise for many times, after a long time to fall to the anode. The axial magnetic field have made electronic circular motion, direct and rapid fly to prevent electronic anode. Electromagnetic field the overall effect of the electronics in the form of a helix movement close to the anode, forming a layer of electron cloud around the anode, increases the chances of the electrons collide with the residual gas ionization. Electrons from one collide with the residual gas in a vacuum to the next by the average distance between collision is called the mean free path. When 10-6 Tuo vacuum mean free distance is about 285 meters. And the average free path in titanium pump greatly shortened. Three pole titanium pump, it is in front of the pump diode titanium cathode increased pump wall, form a third electrode, pump wall and anodic potential, titanium ion sputtering atom to the walls of the pump where the oblique sputtering out more than a diode pump titanium atoms.
Gas molecules and high-speed movement of electron impact ionization, form positive ions and one or more electrons, the electronic controlled electromagnetic field into the rotating electron cloud, when it again with the gas molecular collision, ionization again and produce new electronic, the electron, called numerous secondary electron flow. Positive ions in the role of the electromagnetic field to the cathode accelerated motion, and the bombarding cathode sputtering titanium plate titanium atoms on the surface of the cathode and secondary electron. Gas ion impact of cathode, and from the cathode surface to release one or more atoms process known as sputtering. Sputtering of titanium atoms deposited on the inner wall of the anode and the cathode plate, forming new titanium membrane, maintain titanium pump suction ability. An ion bombardment of titanium and titanium plate can splash of atoms called sputtering coefficient. Sputtering coefficient associated with ion energy, quality and incident Angle. Must maintain enough voltage of Yin and Yang to keep on titanium anode tube membrane adsorption ability. Ion bombardment titanium target to produce secondary electron, and under the action of electromagnetic field, high speed movement into the electron cloud, with numerous flow secondary electron supplement because of absorbed by anode electronic continuously maintain penning discharge.
Gas molecules and high-speed movement of electron impact ionization, form positive ions and one or more electrons, the electronic controlled electromagnetic field into the rotating electron cloud, when it again with the gas molecular collision, ionization again and produce new electronic, the electron, called numerous secondary electron flow. Positive ions in the role of the electromagnetic field to the cathode accelerated motion, and the bombarding cathode sputtering titanium plate titanium atoms on the surface of the cathode and secondary electron. Gas ion impact of cathode, and from the cathode surface to release one or more atoms process known as sputtering. Sputtering of titanium atoms deposited on the inner wall of the anode and the cathode plate, forming new titanium membrane, maintain titanium pump suction ability. An ion bombardment of titanium and titanium plate can splash of atoms called sputtering coefficient. Sputtering coefficient associated with ion energy, quality and incident Angle. Must maintain enough voltage of Yin and Yang to keep on titanium anode tube membrane adsorption ability. Ion bombardment titanium target to produce secondary electron, and under the action of electromagnetic field, high speed movement into the electron cloud, with numerous flow secondary electron supplement because of absorbed by anode electronic continuously maintain penning discharge.
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