2015年3月26日星期四

Titanium pumps and Pan Ning discharge


The working process of sputtering titanium pumps is complex, simple can be summarized as follows,
First of all, starting power source, generate high voltage between the plates in the Yin and yang. Because of the inter stage was very close, according to E=U/d, the numerical E electric field intensity is very large, especially in the anode tube wall at the edge.

  In a strong electric field and parallel to the magnetic field, using the spiral mode of high speed motion of electrons, due to the increase in the electron motion stroke,titanium alloy pump , greatly improves the probability of collision with the gas molecular.

  Electron collisions with gas molecules in space to generate positive ions and two electrons, generated electrons continue to produce new positive ions,titanium coil  and electrons with the gas molecular collision.The discharge is called Pan Ning Pan Ning discharge, discharge can be carried out in the pressure is very low.


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