Ion pump and sublimation pump can obtain high vacuum degree,titanium coil , but using them to obtain higher vacuum will have great difficulty. This work has a great relationship with them.
The ability to capture the gas molecular titanium pumps rely on physical adsorption of Co..chemical bond sublimation pump energy produced although large, but easily formed on the surface of saturated, affecting the further absorption gas, and sublimation pump on the adsorption effect of inert gas is not good.
The two types of pump combined, can get better effect of sputtering ion pump suction.
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