Inspiratory capacity of titanium film

Sputtered titanium  atoms deposited on the inner wall, the anode and cathode plate pumping ability, forming a titanium film fresh maintaining titanium pump. Sputtering ion with the incident ion energy, mass and incident angle is different, high energy, sputtering ion mass is big. The oblique better effect than vertical bombardment.

  In order to ensure that the suction capacity of titanium film on the anode cylinder, must ensure enough sputtering rate, that is required to have enough voltage, to ensure that the ion energy bombarding get enough.