2015年2月24日星期二

Titanium pump gas removal mechanism

1) on the activity of gas exhausting

Chemical adsorption excluded depends mainly on the deposited on the anode cylinder wall titanium membrane for N2, O2, CO and CO2 gases.


2) of the hydrogen pumping

The hydrogen titanium pumps chemical adsorption, diffusion, absorption, or dissolution.


3) on the inert gas exhausting

Exclusion of inert gases, mainly by ion buried, by inert gas ion bombardment ionization of the cathode, the following three conditions,
  • Ion directly into the cathode, anode plate or into the cathode edge on the opposite side of the titanium  deposition in.
  • Oblique ion cut into the surface of the cathode, with ion and titanium was blown off and deposited on the cathode plates or other places around.
  • Ion did not enter the plate, but receive electronic and composite for neutral atoms from.the cathode, and then reflected to the inner surface of the titanium anode film.

没有评论:

发表评论