Properties of titanium pump

1)10-8 PA pressure limit

(2) the pumping speed,
titanium pump pumping speed and the anode voltage and magnetic field intensity, magnetic field strength when the pumping speed is high, the anode voltage corresponding to the best pumping speed is high.

  Commonly used titanium pump pumping speed of 25 L / s, 5 liters / sec. Require large pumping speed for the occasion, the basic structural unit can be used in parallel manner to make the pumping speed 50 L / s, 100 liters / sec etc..

(3) start pressure, 10-2 pa
(4) life,

•  cathode depletion of life

Plate due to sputtering cathode penetrating and the pump can not be used.

•  anodic stripping life

Anodic Deposition of titanium film thickness is too large will have peeled off, resulting in irregular titanium alloy pump pressure is intense change, the pump can not be used.

•  anode sucking the life

The anode of adsorbed and dissolved a lot of helium, hydrogen, when the saturated adsorption gas when the pump can not.

  Under normal circumstances, life of up to tens of thousands of hours of sputtering ion pump.